We provide a range of products and services in the area of semiconductor processing. Application areas include, etching/deposition of metals and oxides, nano-structure fabrication and measurement techniques.

Key Areas

	Sputtering systems and tools for deposition of metals and oxides: Titanium, Moly, Aluminium, Copper, Gold, Chrome, Silicon Dioxide, Silicon Nitride.
	Dry etching systems including plasma ashing.
	Electron-beam lithography systems for nano-fabrication.
	Analytical measurement tools including ellipsometers, nano-spec, profileometers.